Mass Flow Control
HORIBA offers a wide variety of products for mass flow control in the form of controllers and meters, our large range includes both gas and liquid flow controllers so you are sure to find one that meets your requirements. All our mass flow control products offer high accuracy and a fast response time.
The range of gas flow controllers includes two types of sensors, pressure-based and thermal type and three types of control valves; choose from thermal, solenoid, or piezo-electric. Our products utilise various communication types including analouge, digital, DeviceNet™, PROFIBUS™, and EtherCAT® (depending on product models).
The liquid product line-up can measure and control flows from 0.01 g/min to 100 g/min.
The gas product line-up can measure and control gas flows from 0.02 ccm to 1000 lm.
Find out more about Mass Flow Control Meters here.
Find out more about the characteristics of a Digital Mass Flow Controller here.
Learn more about HORIBA's CRITERION D500 Digital Mass Flow Module here.
Top of the Range
The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.
Class Leading Performance
High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.
Best Selling
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
General Purpose (Digital/Analog communication)
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.
General Purpose (Analog communication)
The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.
High Temperature
The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.
Accessories
This multi-function control unit is equipped with a program setting function, preset function, and integrating function. The front panel simplifies operation.
The PE-D20 control unit integrates high frequency functions via the front panel controls.
The PE series of dedicated power sources can be used as drive power sources for mass flow controllers, meters, and auto pressure regulator as well as for dedicated display units, and supply the standard flow rate setting voltage. The series includes a lineup of models that have flow rate alarm output function, models offering 0 signals and 4 to 20mA, and models that are capable of driving up to six units.
The DU-102E and DU-103K display the flow rate output signal from mass flow controllers and meters. Matching these units to the full-scale flow rate values of mass flow controllers and meters enables direct monitoring of control and measured flow rates.
The SC series consists of signal cables that connect mass flow controller and meters to control units. The SC series includes a serge provision by a shield cables. Simply select the appropriate adapter for your needs.
The CA-E series are conversion adapters that can be utilized when other manufactures mass flow control systems are used with mass flow controllers and meters. Simply select the appropriate adapter for your needs.
Dedicated power source: These setting units convert the standard flow rate setting voltage input (+5 VDC) to the desired type of flow rate and pressure setting signal and input that to the controller.
The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.
* Devicenet is a trademark of Open DeviceNet Vender Association.
PROFIBUS is a trademark of PROFIBUS International.
EtherCAT is a trademark of Beckhoff Automation GmbH, Germany.